- Manufacturing and Macroscopic Properties of Cold Sprayed Cu-Ga Coating Material for Sputtering Target
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Young-Min Jin, Min-Gwang Jeon, Dong-Yong Park, Hyung-Jun Kim, Ik-Hyun Oh, Kee-Ahn Lee
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J Korean Powder Metall Inst. 2013;20(4):245-252.
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DOI: https://doi.org/10.4150/KPMI.2013.20.4.245
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- This study attempted to manufacture a Cu-Ga coating layer via the cold spray process and to investigate the applicability of the layer as a sputtering target material. In addition, changes made to the microstructure and properties of the layer due to annealing heat treatment were evaluated, compared, and analyzed. The results showed that coating layers with a thickness of 520 mm could be manufactured via the cold spray process under optimal conditions. With the Cu-Ga coating layer, the alpha-Cu and Cu_3Ga were found to exist inside the layer regardless of annealing heat treatment. The microstructure that was minute and inhomogeneous prior to thermal treatment changed to homogeneous and dense with a more clear division of phases. A sputtering test was actually conducted using the sputtering target Cu-Ga coating layer (~2 mm thickness) that was additionally manufactured via the cold-spray coating process. Consequently, this test result confirmed that the cold sprayed Cu-Ga coating layer may be applied as a sputtering target material.
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Citations
Citations to this article as recorded by  - Microscopic Examination of Cold Spray Cermet Sn+In2O3Coatings for Sputtering Target Materials
M. Winnicki, A. Baszczuk, M. Rutkowska-Gorczyca, M. Jasiorski, A. Małachowska, W. Posadowski, Z. Znamirowski, A. Ambroziak
Scanning.2017; 2017: 1. CrossRef - Effect of powder alloy composition on the microstructure and properties of kinetic sprayed Cu-Ga based coating materials
Byung-Chul Choi, Dong-Yong Park, Kee-Ahn Lee
Metals and Materials International.2016; 22(4): 649. CrossRef - Manufacturing and Properties of CGI-based Composite Coating Layer Utilizing a Warm Spray Process and Cu-Ga and Cu-In Mixed Powders
Min-Gwang Jeon, Myeong-Ju Lee, Hyeong-Jun Kim, Kee-Ahn Lee
Journal of Korean Powder Metallurgy Institute.2014; 21(3): 229. CrossRef - Manufacturing of Cu Repair Coating Material Using the Kinetic Spray Process and Changes in the Microstructures and Properties by Heat Treatment
Min-Gwang Jeon, Hyung-Jun Kim, Kee-Ahn Lee
Journal of Korean Powder Metallurgy Institute.2014; 21(5): 349. CrossRef
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