- Synthesis and Properties of a Ge2Sb2Te5 Sputtering for Use as a Target by Spark Plasma Sintering
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C. W Bang, K. B Kim, J. K Lee
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J Korean Powder Metall Inst. 2014;21(2):137-141. Published online April 1, 2014
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DOI: https://doi.org/10.4150/KPMI.2014.21.2.137
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Abstract
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In this study, we report the sintering behavior and properties of a Ge2Sb2Te5 alloy powders for use as a sputtering target by spark plasma sintering. The effect of various sintering parameters, such as pressure, temperature and time, on the density and hardness of the target has been investigated in detail. Structural characterization was performed by scanning electron microscopy and X-ray diffraction. Hardness and thermal properties were measured by differential scanning calorimetry and micro-vickers hardness tester. The density and hardness of the sintered Ge2Sb2Te5 materials were 5.8976~6.3687 g/cm3 and 32~75 Hv, respectively.
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