The conversion of carbon preforms to dense SiC by liquid infiltration is a prospectively low-cost and reliable method of forming SiC-Si composites with complex shapes and high densities. Si powder was coated on top of a 2.0wt .% Y₂O₃-added carbon preform, and reaction bonded silicon carbide (RBSC) was prepared by infiltrating molten Si at 1,450°C for 1-8 h. Reactive sintering of the Y₂O₃-free carbon preform caused Si to be pushed to one side, thereby forming cracking defects. However, when prepared from the Y₂O₃-added carbon preform, a SiC-Si composite in which Si is homogeneously distributed in the SiC matrix without cracking can be produced. Using the Si + C → SiC reaction at 1,450°C, 3C and 6H SiC phases, crystalline Si, and Y₂O₃ were generated based on XRD analysis, without the appearance of graphite. The RBSC prepared from the Y₂O₃-added carbon preform was densified by increasing the density and decreasing the porosity as the holding time increased at 1,450°C. Dense RBSC, which was reaction sintered at 1,450°C for 4 h from the 2.0wt.% Y₂O₃-added carbon preform, had an apparent porosity of 0.11% and a relative density of 96.8%.