The semiconductor industry faces physical limitations due to its top-down manufacturing processes. High cost of EUV equipment, time loss during tens or hundreds of photolithography steps, overlay, etch process errors, and contamination issues owing to photolithography still exist and may become more serious with the miniaturization of semiconductor devices. Therefore, a bottom-up approach is required to overcome these issues. The key technology that enables bottom-up semiconductor manufacturing is area-selective atomic layer deposition (ASALD). Here, various ASALD processes for elemental metals, such as Co, Cu, Ir, Ni, Pt, and Ru, are reviewed. Surface treatments using chemical species, such as self-assembled monolayers and small-molecule inhibitors, to control the hydrophilicity of the surface have been introduced. Finally, we discuss the future applications of metal ASALD processes.

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• Selective Atomic Layer Deposition of Co Thin Films Using Co(EtCp)2 Precursor
  Sujeong Kim, Yong Tae Kim, Jaeyeong Heo
  Korean Journal of Materials Research.2024; 34(3): 163.     CrossRef

AlSi10Mg alloys are being actively studied through additive manufacturing for application in the automobile and aerospace industries because of their excellent mechanical properties. To obtain a consistently high quality product through additive manufacturing, studying the flowability and spreadability of the metal powder is necessary. AlSi10Mg powder easily forms an oxide film on the powder surface and has hydrophilic properties, making it vulnerable to moisture. Therefore, in this study, AlSi10Mg powder was hydrophobically modified through silane surface treatment to improve the flowability and spreadability by reducing the effects of moisture. The improved flowability according to the number of silane surface treatments was confirmed using a Carney flowmeter. In addition, to confirm the effects of improved spreadability, the powder prior to surface treatment and that subjected to surface treatment four times were measured and compared using s self-designed recoating tester. The results of this study confirmed the improved flowability and spreadability based on the modified metal powder from hydrophilic to hydrophobic for obtaining a highquality additive manufacturing product.

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• Residual Stress Analysis of Additive Manufactured A356.2 Aluminum Alloys using X-Ray Diffraction Methods
  SangCheol Park, InYeong Kim, Young Il Kim, Dae-Kyeom Kim, Soong Ju Oh, Kee-Ahn Lee, Bin Lee
  Korean Journal of Metals and Materials.2023; 61(7): 534.     CrossRef