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- 나노인덴테이션을 이용한 MLCC용 BaTiO3 세라믹스의 기계적 물성평가
- 류성수, 김성원, 김형준, 김형태
- Feasibility Test for Mechanical Property Characterization of BaTiO3 Ceramics for MLCC Application Using Nanoindentation
- Sung-Soo Ryu, Seong-Won Kim, Hyeong-Jun Kim, Hyung-Tae Kim
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Journal of Korean Powder Metallurgy Institute 2009;16(1):37-42
DOI: https://doi.org/10.4150/KPMI.2009.16.1.037
1요업기술원 이천분원 엔지니어링세라믹센터
2요업기술원 이천분원 엔지니어링세라믹센터
3요업기술원 이천분원 엔지니어링세라믹센터
4요업기술원 이천분원 엔지니어링세라믹센터
1Engineering Ceramics Center, Korea Institute of Ceramic Engineering and Technology
2Engineering Ceramics Center, Korea Institute of Ceramic Engineering and Technology
3Engineering Ceramics Center, Korea Institute of Ceramic Engineering and Technology
4Engineering Ceramics Center, Korea Institute of Ceramic Engineering and Technology
2요업기술원 이천분원 엔지니어링세라믹센터
3요업기술원 이천분원 엔지니어링세라믹센터
4요업기술원 이천분원 엔지니어링세라믹센터
1Engineering Ceramics Center, Korea Institute of Ceramic Engineering and Technology
2Engineering Ceramics Center, Korea Institute of Ceramic Engineering and Technology
3Engineering Ceramics Center, Korea Institute of Ceramic Engineering and Technology
4Engineering Ceramics Center, Korea Institute of Ceramic Engineering and Technology
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Abstract
In this study, the feasible test for the mechanical property characterization of BaTiO_3 ceramics and multi-layer ceramic capacitor(MLCC) was performed with nanoindentation technique. In case of BaTiO_3 ceramics, hardness and elastic modulus are dependent on the densification of specimen showing the highest hardness and elastic modulus values of 12.3 GPa and 155 GPa, respectively at 1260°C. In case of MLCC chip, hardness of dielectric layer was lower than that of margin region. The nanoindentation method could be useful tool for the measurement of mechanical property within BaTiO_3 dielectric layer of very thin thickness in high capacitance MLCC.
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