The present study is concerned with the effect of PM process variables on the microstructure by using atomized superalloy powders. It is suggested that the inhomogeneity of composition is strongly dependent on the process variables. The contents of segregation elements of plasma rotating electrode process (PREP) powders are larger than those of Ar atomization (AA) powders. As HIP treatment temperature in-increases, the secondary phases on the prior particle boundaries (PPB) have continuous,uniform distribution and high density, but the amount of PPB decreases suddenly at 1150°C. Segregated phases on the PPB are identified to be MC type carbide. Brittle MC type carbides on the PPB provide fracture initiation sites and preferred fracture path, thereby leading to intergranular type brittle fracture.