Abstract

Aluminum was deposited on aluminum oxide powders using a fluidized bed reactor at atmospheric pressure. The aluminum oxide powders were irregular flakes with acute angles and the average particle size was 26 mutextrmm. The fluidized bed was formed by flowing argon gas at the velocity of 60 cm/sec. The optimal fluidization condition was obtained with the reactor designed to be tapered so that the fluid velocity decreases as the fluidizing gas goes up along the reactor. Aluminum was deposited by flowing TiBA(Triisobutylaluminum) evaporated at250°C through the fluidized bed reactor heated to 350~450°C. The result from the analysis by XRD and EDAX confirmed the coating of aluminum and an SEM micrograph showed the conformality.