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Principle and Applications of EELS Spectroscopy in Material Characterizations
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재료 분석에서 전자 에너지 손실 스펙트럼 (EELS)의 원리 및 응용 연구
윤상원, 김규현, 안재평, 박종구
Principle and Applications of EELS Spectroscopy in Material Characterizations
Sang-Won Yoon, Kyou-Hyun Kim, Jae-Pyoung Ahn, Jong-Ku Park
Journal of Korean Powder Metallurgy Institute 2007;14(3):157-164
DOI: https://doi.org/10.4150/KPMI.2007.14.3.157
1한국과학기술연구원 특성분석센터
2한국과학기술연구원 특성분석센터
3한국과학기술연구원 특성분석센터
4한국과학기술연구원 나노소재기술개발센터
1Advanced Analysis Center, Korea Institute of Science and Technology
2Advanced Analysis Center, Korea Institute of Science and Technology
3Advanced Analysis Center, Korea Institute of Science and Technology
4NanoScience Research Division, Korea Institute of Science and Technology
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An electron energy loss spectroscopy (EELS) instrument attached on transmission electron microscopy (TEM) becomes a powerful and analytical tool for extracting the noble information of materials using the enhancement of TEM images, elemental analysis, elemental or chemical mapping images, electron energy loss near edge structure (ELNES), and extended energy-loss fine structure (EXELFS). In this review, the principle and applications of EELS which is widely used in material, life, and electronic sciences were introduced.

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