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- 스퍼터링 타겟용 저온 분사 Cu-15 at.%Ga 코팅 소재의 특성에 미치는 열처리 분위기의 영향
- 최병철, 박동용, 김형준, 오익현, 이기안
- Effect of Heat Treatment Environment on the Properties of Cold Sprayed Cu-15 at.%Ga Coating Material for Sputtering Target
- Byung-Chul Choi, Dong-Yong Park, Hyung-Jun Kim, Ik-Hyun Oh, Kee-Ahn Lee
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Journal of Korean Powder Metallurgy Institute 2011;18(6):552-561
DOI: https://doi.org/10.4150/KPMI.2011.18.6.552
2(주)태광테크 기술연구소
3포항산업과학연구원
4한국생산기술연구원
5국립 안동대학교 신소재공학부
1School of Advanced Mater. Eng., Andong National University
2Tae-Kwang Tech.
3RIST
4KITECH
5School of Advanced Mater. Eng., Andong National University
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Abstract
This study attempted to manufacture a Cu-15 at.%Ga coating layer via the cold spray process and investigated the effect of heat treatment environment on the properties of cold sprayed coating material. Three kinds of heat treatment environments, 5%H_2+argon, pure argon, and vacuum were used in this study. Annealing treatments were conducted at 200sim800°C/1 hr. With the cold sprayed coating layer, pure alpha-Cu and small amounts of Ga_2O_3 were detected in the XRD, EDS, EPMA analyses. Porosity significantly decreased and hardness also decreased with increasing annealing temperature. The inhomogeneous dendritic microstructure of cold sprayed coating material changed to the homogeneous and dense one (microstructural evolution) with annealing heat treatment. Oxides near the interface of particles could be reduced by heat treatment especially in vacuum and argon environments. Vacuum environment during heat treatment was suggested to be most effective one to improve the densification and purification properties of cold sprayed Cu-15 at.%Ga coating material.
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