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Low Temperature Debinding Process Using Oxygen Plasma for Flexible Printed Electronics
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HOME > J Korean Powder Metall Inst > Volume 19(5); 2012 > Article
Low Temperature Debinding Process Using Oxygen Plasma for Flexible Printed Electronics
Young-In Lee
Journal of Korean Powder Metallurgy Institute 2012;19(5):343-347
DOI: https://doi.org/10.4150/KPMI.2012.19.5.343
Institute of Nano Sensor Technology, Hanyang University
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In this study, an oxygen plasma treatment was used as a low temperature debinding method to form a conductive copper feature on a flexible substrate using a direct printing process. To demonstrate this concept, conductive copper patterns were formed on polyimide films using a copper nanoparticle-based paste with polymeric binders and dispersing agents and a screen printing method. Thermal and oxygen plasma treatments were utilized to remove the polymeric vehicle before a sintering of copper nanoparticles. The effect of the debinding methods on the phase, microstructure and electrical conductivity of the screen-printed patterns was systematically investigated by FE-SEM, TGA, XRD and four-point probe analysis. The patterns formed using oxygen plasma debinding showed the well-developed microstructure and the superior electrical conductivity compared with those of using thermal debinding.

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