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Fabrication of Micro Pattern on Flexible Substrate by Nano Ink using Superhydrophobic Effect
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HOME > J Korean Powder Metall Inst > Volume 20(2); 2013 > Article
초발수 현상을 이용한 나노 잉크 미세배선 제조
손수정, 조영상, 나종주, 최철진
Fabrication of Micro Pattern on Flexible Substrate by Nano Ink using Superhydrophobic Effect
Soo-Jung Son, Young-Sang Cho, Jong Joo Rha, Chul-Jin Cho
Journal of Korean Powder Metallurgy Institute 2013;20(2):120-124
DOI: https://doi.org/10.4150/KPMI.2013.20.2.120
1한국기계연구원 부설 재료연구소
2한국산업기술대학교 생명화학공학과
3한국기계연구원 부설 재료연구소
4한국기계연구원 부설 재료연구소
1Korea Institute of Materials Science
2Korea Polytechnic University
3Korea Institute of Materials Science
4Korea Institute of Materials Science
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This study is carried out to develop the new process for the fabrication of ultra-fine electrodes on the flexible substrates using superhydrophobic effect. A facile method was developed to form the ultra-fine trenches on the flexible substrates treated by plasma etching and to print the fine metal electrodes using conductive nano-ink. Various plasma etching conditions were investigated for the hydrophobic surface treatment of flexible polyimide (PI) films. The micro-trench on the hydrophobic PI film fabricated under optimized conditions was obtained by mechanical scratching, which gave the hydrophilic property only to the trench area. Finally, the patterning by selective deposition of ink materials was performed using the conductive silver nano-ink. The interface between the conductive nanoparticles and the flexible substrates were characterized by scanning electron microscope. The increase of the sintering temperature and metal concentration of ink caused the reduction of electrical resistance. The sintering temperature lower than 200°C resulted in good interfacial bonding between Ag electrode and PI film substrate.

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