- Manufacturing and Macroscopic Properties of Cold Sprayed Cu-Ga Coating Material for Sputtering Target
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Young-Min Jin, Min-Gwang Jeon, Dong-Yong Park, Hyung-Jun Kim, Ik-Hyun Oh, Kee-Ahn Lee
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J Korean Powder Metall Inst. 2013;20(4):245-252.
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DOI: https://doi.org/10.4150/KPMI.2013.20.4.245
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- This study attempted to manufacture a Cu-Ga coating layer via the cold spray process and to investigate the applicability of the layer as a sputtering target material. In addition, changes made to the microstructure and properties of the layer due to annealing heat treatment were evaluated, compared, and analyzed. The results showed that coating layers with a thickness of 520 mm could be manufactured via the cold spray process under optimal conditions. With the Cu-Ga coating layer, the alpha-Cu and Cu_3Ga were found to exist inside the layer regardless of annealing heat treatment. The microstructure that was minute and inhomogeneous prior to thermal treatment changed to homogeneous and dense with a more clear division of phases. A sputtering test was actually conducted using the sputtering target Cu-Ga coating layer (~2 mm thickness) that was additionally manufactured via the cold-spray coating process. Consequently, this test result confirmed that the cold sprayed Cu-Ga coating layer may be applied as a sputtering target material.
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Citations
Citations to this article as recorded by  - Microscopic Examination of Cold Spray Cermet Sn+In2O3Coatings for Sputtering Target Materials
M. Winnicki, A. Baszczuk, M. Rutkowska-Gorczyca, M. Jasiorski, A. Małachowska, W. Posadowski, Z. Znamirowski, A. Ambroziak
Scanning.2017; 2017: 1. CrossRef - Effect of powder alloy composition on the microstructure and properties of kinetic sprayed Cu-Ga based coating materials
Byung-Chul Choi, Dong-Yong Park, Kee-Ahn Lee
Metals and Materials International.2016; 22(4): 649. CrossRef - Manufacturing and Properties of CGI-based Composite Coating Layer Utilizing a Warm Spray Process and Cu-Ga and Cu-In Mixed Powders
Min-Gwang Jeon, Myeong-Ju Lee, Hyeong-Jun Kim, Kee-Ahn Lee
Journal of Korean Powder Metallurgy Institute.2014; 21(3): 229. CrossRef - Manufacturing of Cu Repair Coating Material Using the Kinetic Spray Process and Changes in the Microstructures and Properties by Heat Treatment
Min-Gwang Jeon, Hyung-Jun Kim, Kee-Ahn Lee
Journal of Korean Powder Metallurgy Institute.2014; 21(5): 349. CrossRef
- Effect of Heat Treatment Environment on the Properties of Cold Sprayed Cu-15 at.%Ga Coating Material for Sputtering Target
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Byung-Chul Choi, Dong-Yong Park, Hyung-Jun Kim, Ik-Hyun Oh, Kee-Ahn Lee
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J Korean Powder Metall Inst. 2011;18(6):552-561.
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DOI: https://doi.org/10.4150/KPMI.2011.18.6.552
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186
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9
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Abstract
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- This study attempted to manufacture a Cu-15 at.%Ga coating layer via the cold spray process and investigated the effect of heat treatment environment on the properties of cold sprayed coating material. Three kinds of heat treatment environments, 5%H_2+argon, pure argon, and vacuum were used in this study. Annealing treatments were conducted at 200sim800°C/1 hr. With the cold sprayed coating layer, pure alpha-Cu and small amounts of Ga_2O_3 were detected in the XRD, EDS, EPMA analyses. Porosity significantly decreased and hardness also decreased with increasing annealing temperature. The inhomogeneous dendritic microstructure of cold sprayed coating material changed to the homogeneous and dense one (microstructural evolution) with annealing heat treatment. Oxides near the interface of particles could be reduced by heat treatment especially in vacuum and argon environments. Vacuum environment during heat treatment was suggested to be most effective one to improve the densification and purification properties of cold sprayed Cu-15 at.%Ga coating material.
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Citations
Citations to this article as recorded by - Manufacturing of Large-Scale Cold-Sprayed Ta Target Material and Its Sputtering Property
Gi-Su Ham, Dong-Yeol Wi, Jun-Mo Yang, Kee-Ahn Lee
Journal of Thermal Spray Technology.2019; 28(8): 1974. CrossRef - Effect of Hot Isostatic Pressing on the Microstructure and Propertiesof Kinetic Sprayed Nb Coating Material
Ji-Hye Lee, Sangsun Yang, Kee-Ahn Lee
Journal of Korean Powder Metallurgy Institute.2016; 23(1): 15. CrossRef - Fabrication and Microstructure/Properties of Bulk-typeTantalum Material by a Kinetic Spray Process
Ji-Hye Lee, Ji-Won Kim, Kee-Ahn Lee
Journal of Korean Powder Metallurgy Institute.2016; 23(1): 8. CrossRef - Effect of Heat Treatment Environment on the Microstructure and Properties of Kinetic Sprayed Tantalum Coating Layer
Ji-Hye Lee, Hyung-Jun Kim, Kee-Ahn Lee
Journal of Korean Powder Metallurgy Institute.2015; 22(1): 32. CrossRef - The Effect of Annealing Heat Treatment on the Microstructure and Macroscopic Properties of Kinetic-Sprayed Ta Coating Layer
Myeong Ju Lee, Jae Sung Oh, Hyung Jun Kim, Ik Hyun Oh, Kee Ahn Lee
Advanced Materials Research.2014; 893: 64. CrossRef - Manufacturing of Cu Repair Coating Material Using the Kinetic Spray Process and Changes in the Microstructures and Properties by Heat Treatment
Min-Gwang Jeon, Hyung-Jun Kim, Kee-Ahn Lee
Journal of Korean Powder Metallurgy Institute.2014; 21(5): 349. CrossRef - Manufacturing and Properties of CGI-based Composite Coating Layer Utilizing a Warm Spray Process and Cu-Ga and Cu-In Mixed Powders
Min-Gwang Jeon, Myeong-Ju Lee, Hyeong-Jun Kim, Kee-Ahn Lee
Journal of Korean Powder Metallurgy Institute.2014; 21(3): 229. CrossRef - Effect of Heat Treatment Environment on the Densification of Cold Sprayed Ti Coating Layer
Ji-Sang Yu, Hyung-Jun Kim, Ik-Hyun Oh, Kee-Ahn Lee
Journal of Korean Powder Metallurgy Institute.2012; 19(2): 110. CrossRef - Sintering and Rolling Behavior of Cu-50In-13Ga Ternary Alloy Powder for Sputtering Target
Dae-Won Kim, Yong-Ho Kim, Jung-Han Kim, Dae-Guen Kim, Jong-Hyeon Lee, Kwang-Bo Choi, Hyeon-Taek Son
Journal of Korean Powder Metallurgy Institute.2012; 19(4): 264. CrossRef
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