- Synthesis of Tantalum Oxy-nitride and Nitride using Oxygen Dificiency Tantalum Oxides
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Jong-Chul Park, Jae-Hwan Pee, Yoo-Jin Kim, Eui-Seock Choi
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J Korean Powder Metall Inst. 2008;15(6):489-495.
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DOI: https://doi.org/10.4150/KPMI.2008.15.6.489
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 Abstract
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- Colored tantalum oxy-nitride (TaON) and tantalum nitride (Ta_3N_5) were synthesized by ammonolysis. Oxygen deficient tantalum oxides (TaO_1.7) were produced by a titration process, using a tantalum chloride (TaCl_5) precursor. The stirring speed and the amount of NH_4OH were important factors for controling the crystallinity of tantalum oxides. The high crystallinity of tantalum oxides improved the degree of nitridation which was related to the color value. Synthesized powders were characterized by XRD, SEM, TEM and Colorimeter.
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