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- 산소결핍 탄탈륨 산화물을 활용한 탄탈륨 산질화물 및 질화물 합성
- 박종철, 피재환, 김유진, 최의석
- Synthesis of Tantalum Oxy-nitride and Nitride using Oxygen Dificiency Tantalum Oxides
- Jong-Chul Park, Jae-Hwan Pee, Yoo-Jin Kim, Eui-Seock Choi
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Journal of Korean Powder Metallurgy Institute 2008;15(6):489-495
DOI: https://doi.org/10.4150/KPMI.2008.15.6.489
1요업(세라믹)기술원 산업도자팀
2요업(세라믹)기술원 산업도자팀
3요업(세라믹)기술원 산업도자팀
4요업(세라믹)기술원 산업도자팀
1Advanced Ceramic Team, Korea Institute of Ceramic Engineering & Technology
2Advanced Ceramic Team, Korea Institute of Ceramic Engineering & Technology
3Advanced Ceramic Team, Korea Institute of Ceramic Engineering & Technology
4Advanced Ceramic Team, Korea Institute of Ceramic Engineering & Technology
2요업(세라믹)기술원 산업도자팀
3요업(세라믹)기술원 산업도자팀
4요업(세라믹)기술원 산업도자팀
1Advanced Ceramic Team, Korea Institute of Ceramic Engineering & Technology
2Advanced Ceramic Team, Korea Institute of Ceramic Engineering & Technology
3Advanced Ceramic Team, Korea Institute of Ceramic Engineering & Technology
4Advanced Ceramic Team, Korea Institute of Ceramic Engineering & Technology
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Abstract
Colored tantalum oxy-nitride (TaON) and tantalum nitride (Ta_3N_5) were synthesized by ammonolysis. Oxygen deficient tantalum oxides (TaO_1.7) were produced by a titration process, using a tantalum chloride (TaCl_5) precursor. The stirring speed and the amount of NH_4OH were important factors for controling the crystallinity of tantalum oxides. The high crystallinity of tantalum oxides improved the degree of nitridation which was related to the color value. Synthesized powders were characterized by XRD, SEM, TEM and Colorimeter.
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