Al₂O₃-SiC ceramic composites are produced using pressureless sintering, and their plasma resistance, electrical resistance, and mechanical properties are evaluated to confirm their applicability as electrostatic-discharge-safe components for semiconductor devices. Through the addition of Mg and Y nitrate sintering aids, it is confirmed that even if SiC content exceeded 10%, complete densification is possible by pressureless sintering. By the uniform distribution of SiC, the total grain growth is suppressed to about 1 μm; thus an Al₂O₃-SiC sintered body with a high strength over 600 MPa is obtained. The optimum amount of SiC to satisfy all the desired properties of electrostaticdischarge-safe ceramic components is obtained by finding the correlation between the plasma resistance and the electrical resistivity as a function of SiC amount.

Citations

Citations to this article as recorded by  

• Reactive ceramic pellets incorporated iron for removing As(III), As(V), and Cr(VI) from aqueous solutions
  Sunwon Rha, Yun Sik Gong, Ho Young Jo
  Desalination and Water Treatment.2019; 158: 174.     CrossRef
• Application of Physical and Chemical Enhanced Backwashing to Reduce Membrane Fouling in the Water Treatment Process Using Ceramic Membranes
  Seogyeong Park, Joon-Seok Kang, Jeong Jun Lee, Thi-Kim-Quyen Vo, Han-Seung Kim
  Membranes.2018; 8(4): 110.     CrossRef
• Effects of particle size and forming pressure on pore properties of Fe-Cr-Al porous metal by pressureless sintering
  Bon-Uk Koo, Yujeong Yi, Minjeong Lee, Byoung-Kee Kim
  Metals and Materials International.2017; 23(2): 336.     CrossRef
• Characterization and Microstructure of an Extruded Flat-Tubular-Type Alumina Filter
  Byung-Seo Bae, Jang-Hoon Ha, In-Hyuck Song
  Journal of the Korean Ceramic Society.2014; 51(5): 406.     CrossRef