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1 "Plasma resistance"
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Fabrication and Characterisitics of Al2O3-SiC Ceramic Composites for Electrostatic Discharge Safe Components
Ha-Neul Kim, Hyun-Myung Oh, Young-Jo Park, Jae-Woong Ko, Hyun-Kwuon Lee
J Korean Powder Metall Inst. 2018;25(2):144-150.   Published online April 1, 2018
DOI: https://doi.org/10.4150/KPMI.2018.25.2.144
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Al2O3-SiC ceramic composites are produced using pressureless sintering, and their plasma resistance, electrical resistance, and mechanical properties are evaluated to confirm their applicability as electrostatic-discharge-safe components for semiconductor devices. Through the addition of Mg and Y nitrate sintering aids, it is confirmed that even if SiC content exceeded 10%, complete densification is possible by pressureless sintering. By the uniform distribution of SiC, the total grain growth is suppressed to about 1 μm; thus an Al2O3-SiC sintered body with a high strength over 600 MPa is obtained. The optimum amount of SiC to satisfy all the desired properties of electrostaticdischarge-safe ceramic components is obtained by finding the correlation between the plasma resistance and the electrical resistivity as a function of SiC amount.


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