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HOME > J Korean Powder Metall Inst > Volume 20(2); 2013 > Article
SMPS 시스템에서 용매(물)가 나노입도측정결과에 미치는 영향
황보선애, 추민철
The Effect of Water Droplets on the Nano Particle Size Distribution using the SMPS System
Seon-Ae Hwangbo, Min-Cheol Chu
Journal of Korean Powder Metallurgy Institute 2013;20(2):129-133
DOI: https://doi.org/10.4150/KPMI.2013.20.2.129
1한국표준과학연구원 신기능재료표준센터
2한국표준과학연구원 신기능재료표준센터
1Center for New Functional Materials Metrology, KRISS
2Center for New Functional Materials Metrology, KRISS
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Citations

Citations to this article as recorded by  Crossref logo
  • Investigation of a Standard Particle Deposition System on Wafer Surface and Its Application to Wafer Cleaning
    Younsun Cho, Seokjun Hong, Seungjae Lee, Jichul Yang, Seung-Ki Chae, Taesung Kim
    ECS Journal of Solid State Science and Technology.2019; 8(12): P768.     CrossRef
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