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- 화학기상공정을 이용한 나노질화알루미늄 분말 합성
- 피재환, 박종철, 김유진, 황광택, 김수룡
- Synthesis of Nano-size Aluminum Nitride Powders by Chemical Vapor Process
- Jae-Hwan Pee, Jong-Chul Park, Yoo-Jin Kim, Kwang-Taek Hwang, So-Ryong Kim
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Journal of Korean Powder Metallurgy Institute 2008;15(6):496-502
DOI: https://doi.org/10.4150/KPMI.2008.15.6.496
1요업(세라믹)기술원 산업도자팀
2요업(세라믹)기술원 산업도자팀
3요업(세라믹)기술원 산업도자팀
4요업(세라믹)기술원 산업도자팀
5요업(세라믹)기술원 산업도자팀
1Advanced Ceramic Team, Korea Institute of Ceramic Engineering & Technology
2Advanced Ceramic Team, Korea Institute of Ceramic Engineering & Technology
3Advanced Ceramic Team, Korea Institute of Ceramic Engineering & Technology
4Advanced Ceramic Team, Korea Institute of Ceramic Engineering & Technology
5Advanced Ceramic Team, Korea Institute of Ceramic Engineering & Technology
2요업(세라믹)기술원 산업도자팀
3요업(세라믹)기술원 산업도자팀
4요업(세라믹)기술원 산업도자팀
5요업(세라믹)기술원 산업도자팀
1Advanced Ceramic Team, Korea Institute of Ceramic Engineering & Technology
2Advanced Ceramic Team, Korea Institute of Ceramic Engineering & Technology
3Advanced Ceramic Team, Korea Institute of Ceramic Engineering & Technology
4Advanced Ceramic Team, Korea Institute of Ceramic Engineering & Technology
5Advanced Ceramic Team, Korea Institute of Ceramic Engineering & Technology
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Abstract
Aluminum nitride (AlN) powders were prepared by the chemical vapor synthesis (CVS) process in the AlCl_3-NH_3-N_2 system. Aluminum chloride (AlCl_3) as the starting material was gasified in the heating chamber of 300°C. Aluminum chloride gas transported to the furnace in NH_3-N_2 atmosphere at the gas flow rate of 200-400ml/min. For samples synthesized between 700 and 1200°C, the XRD peaks corresponding to AlN were comparatively sharp and also showed an improvement of crystallinity with increasing the reaction temperature. In additions, the average particle size of the AlN powders decreased from 250 to 40 nm, as the reaction temperature increased.
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