- [English]
- Fabrication and Pore Characteristics of Metal Powder Filters with a Cross-Sealed Honeycomb Shape Using Material Extrusion Additive Manufacturing
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Minji Kim, Min-Jeong Lee, Su-Jin Yun, Poong-Yeon Kim, Hyeon Ju Kim, Juyong Kim, Jung Woo Lee, Jung-Yeul Yun
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J Powder Mater. 2025;32(4):299-308. Published online August 29, 2025
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DOI: https://doi.org/10.4150/jpm.2025.00234
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Abstract
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- The development of high-performance metal filters is essential for maintaining ultra-clean environments in semiconductor manufacturing. In this study, cross-sealed honeycomb filters were fabricated using STS316L powder via material extrusion additive manufacturing (MEAM) for semiconductor gas filtration. The effects of filter geometry (4 or 9 channels) and sintering temperature (850°C, 950°C, or 1,050°C) on performance were examined. First, 4-channel and 9-channel filters sintered at the same temperature (950°C) exhibited similar porosities of 50.08% and 50.57%, but the 9-channel filter showed a higher pressure-drop (0.26 bar) and better filtration-efficiency (3.55 LRV) than the 4-channel filter (0.19 bar and 3.25 LRV, respectively). Second, for filters with the same geometry (4-channel) increasing the sintering temperature reduced porosity from 64.52% to 40.33%, while the pressure-drop increased from 0.13 bar to 0.22 bar and filtration-efficiency improved from 2.53 LRV to 3.51 LRV. These findings demonstrate that filter geometry and sintering temperature are key factors governing the trade-off between air permeability, pressure-drop, and filtration efficiency. This work provides insights and data for optimizing MEAM-based high-performance metal powder filter design.
- [Korean]
- A Study on the Microstructure and Magnetic Properties of Fe83.2Si5.33-0.33xB10.67-0.67xPxCu0.8 Nanocrystalline Soft Magnetic Alloys
with varying P Content
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Hyun Ah Im, Kyoung-Hoon Bae, Yeong gyun Nam, Subong An, Sangsun Yang, Yong-Jin Kim, Jung Woo Lee, Jae Won Jeong
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J Korean Powder Metall Inst. 2021;28(4):293-300. Published online August 1, 2021
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DOI: https://doi.org/10.4150/KPMI.2021.28.4.293
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Abstract
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We investigate the effect of phosphorous content on the microstructure and magnetic properties of Fe83.2Si5.33-0.33xB10.67-0.67xPxCu0.8 (x = 1–4 at.%) nanocrystalline soft magnetic alloys. The simultaneous addition of Cu and P to nanocrystalline alloys reportedly decreases the nanocrystalline size significantly, to 10–20 nm. In the P-containing nanocrystalline alloy, P atoms are distributed in an amorphous residual matrix, which suppresses grain growth, increases permeability, and decreases coercivity. In this study, nanocrystalline ribbons with a composition of Fe83.2Si5.33-0.33xB10.67- 0.67xPxCu0.8 (x = 1–4 at.%) are fabricated by rapid quenching melt-spinning and thermal annealing. It is demonstrated that the addition of a small amount of P to the alloy improves the glass-forming ability and increases the resistance to undesirable Fex(B,P) crystallization. Among the alloys investigated in this work, an Fe83.2Si5B10P1Cu0.8 nanocrystalline ribbon annealed at 460°C exhibits excellent soft-magnetic properties including low coercivity, low core loss, and high saturation magnetization. The uniform nanocrystallization of the Fe83.2Si5B10P1Cu0.8 alloy is confirmed by high-resolution transmission electron microscopy analysis.
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