a 한국생산기술연구원 한국희소금속산업기술센터
b 한양대학교 융합화학공학과
c 과학기술연합대학원대학교 희소소재 및 반도체 패키징 공학
a Department of Korea Institute for Rare Metals, Korea Institute of Industrial Technology, Incheon Metropolitan City 21999, Korea
b Department of Fusion Chemical Engineering, Hanyang University, Gyeonggi-do 15588, Korea
c Department of Critical Materials and Semiconductor Packaging Engineering, University of Science and Technology, Daejeon Metropilitan City 34113, Korea
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