a 한국생산기술연구원 희소금속산업기술센터
b 한양대학교 신소재공학과
c 과학기술연합대학교 희소소재 및 반도체패키징공학과
a Korean Institute for Rare Metals, Korea Institute of Industrial Technology, 156, Gaetbeol-ro, Yeonsu-gu, Incheon, 21999, Republic of Korea
b Hanyang university, 222, Wangsimni-ro, Seongdong-gu, Seoul, 04763, Republic of Korea
c Critical Materials and Semiconductor Packaging Engineering, University of Science and Technology, Daejeon, 34113, Republic of Korea
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