Abstract

ZnS-SiO_2 composite is normally used for sputtering target. In recent years, high sputtering power for higher deposition rate often causes crack formation of the target. Therefore the target material is required that the sintered target material should have high crack resistance, excellent strength and a homogeneous microstructure with high sintered density. In this study, raw ZnS and ZnS-SiO_2 powders prepared by a 3-D mixer or high energy ball-milling were successfully densified by spark plasma sintering, the effective densification method of hard-to-sinter materials in a short time. After sintering, the fracture toughness was measured by the indentation fracture (IF) method. Due to the effect of crack deflection by the residual stress occurred by the second phase of fine SiO_2, the hardness and fracture toughness reached to 3.031 GPa and 1.014MPacdotm1/2, respectively.

• Keywords: ZnS-SiO_2;Spark plasma sintering;High energy ball-milling;Fracture toughness;